Relaxation modification of the morphology of atomically clean silicon (100) crystal surfaces after treatment with SHF plasma

Relaxation modification of the morphology of atomically clean silicon (100) crystal surfaces... Relaxation modification of the nanomorphology of atomically clean surfaces of silicon (100) crystals with different conductivity types, obtained using low-energy low-pressure SHF plasma, was studied. The influence of the chemical activity of the working gases used on the character and kinetics of postprocess changes in the nanomorhpology was revealed. It was shown that the type of the kinetic dependences is defined by the semiconductor type; the minimal surface energy and a better quality of the interface structure appear after the low-energy SHF plasma treatment in an argon atmosphere. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Relaxation modification of the morphology of atomically clean silicon (100) crystal surfaces after treatment with SHF plasma

Loading next page...
 
/lp/springer_journal/relaxation-modification-of-the-morphology-of-atomically-clean-silicon-lrNjgRDz8a
Publisher
Pleiades Publishing
Copyright
Copyright © 2016 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739716040120
Publisher site
See Article on Publisher Site

Abstract

Relaxation modification of the nanomorphology of atomically clean surfaces of silicon (100) crystals with different conductivity types, obtained using low-energy low-pressure SHF plasma, was studied. The influence of the chemical activity of the working gases used on the character and kinetics of postprocess changes in the nanomorhpology was revealed. It was shown that the type of the kinetic dependences is defined by the semiconductor type; the minimal surface energy and a better quality of the interface structure appear after the low-energy SHF plasma treatment in an argon atmosphere.

Journal

Russian MicroelectronicsSpringer Journals

Published: Jul 14, 2016

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off