Relaxation modification of the nanomorphology of atomically clean surfaces of silicon (100) crystals with different conductivity types, obtained using low-energy low-pressure SHF plasma, was studied. The influence of the chemical activity of the working gases used on the character and kinetics of postprocess changes in the nanomorhpology was revealed. It was shown that the type of the kinetic dependences is defined by the semiconductor type; the minimal surface energy and a better quality of the interface structure appear after the low-energy SHF plasma treatment in an argon atmosphere.
Russian Microelectronics – Springer Journals
Published: Jul 14, 2016
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