Using the experimental results and computer simulation data, we demonstrate the existence of technological regimes of pore formation in the electrolyte-silicon system that are controlled by the delivery of holes to the interface between the two media. We develop a dynamic sequential 3D computer model for describing the formation of porous clusters in silicon with regard to different aspects of anodization, including the electric potential variation in the system at the change in configuration of the interface between the crystal and electrolyte. We investigate features of the hole transport regime described by equations scale-invariant relative to the affine transformation of space and time variables. Porous clusters formed using such technological regimes are characterized by the fractal self-similarity.
Russian Microelectronics – Springer Journals
Published: May 11, 2014
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