Comparative analysis of the advantages and disadvantages of RTP systems and diffusion furnaces (DFs) in terms of the cost efficiency and performance is presented. RTP systems outperform DFs when high temperatures and short processing times are required. The latter are preferable in the case of long-term processes, where large periods of loading/unloading and cooling have a minor effect of the throughput. The performance of the equipment is estimated by conducting such processes as the growth of a gate dielectric, TiSi2formation, and formation of shallow p–njunctions. Short processing times, high heating rates, high purity of process gases, and the possibility of quickly changing over between various process gases are those advantages of RTP that allow this approach to be viewed as a promising way for manufacturing submicron ICs. It is shown that RTP will dominate in the production of sub-0.25-μm ICs and may be a contributory factor for future advances in microelectronic technologies.
Russian Microelectronics – Springer Journals
Published: Oct 10, 2004
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera