Properties of nanosilicon obtained by plasma chemical decomposition of monosilane in a microwave discharge

Properties of nanosilicon obtained by plasma chemical decomposition of monosilane in a microwave... Investigations of nanoscale silicon powders obtained by plasma chemical synthesis in various process parameters were carried out by transmission electron microscopy, X-ray photoelectron spectroscopy, and infrared (IR) spectroscopy. It was demonstrated that the powders consist of spherical particles with an average diameter from 20 to 30 nm. Each particle includes a single-crystal silicon core and amorphous shell whose chemical composition is defined by bonds of silicon with oxygen and hydrogen. The measurements of photoluminescence (FL) show the presence of dim near-infrared FL in the specimen powders, and more intensive emission around 420 nm in the suspension of the powder in ethanol. The character of this emission has not been determined yet. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Properties of nanosilicon obtained by plasma chemical decomposition of monosilane in a microwave discharge

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2012 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739712080148
Publisher site
See Article on Publisher Site

Abstract

Investigations of nanoscale silicon powders obtained by plasma chemical synthesis in various process parameters were carried out by transmission electron microscopy, X-ray photoelectron spectroscopy, and infrared (IR) spectroscopy. It was demonstrated that the powders consist of spherical particles with an average diameter from 20 to 30 nm. Each particle includes a single-crystal silicon core and amorphous shell whose chemical composition is defined by bonds of silicon with oxygen and hydrogen. The measurements of photoluminescence (FL) show the presence of dim near-infrared FL in the specimen powders, and more intensive emission around 420 nm in the suspension of the powder in ethanol. The character of this emission has not been determined yet.

Journal

Russian MicroelectronicsSpringer Journals

Published: Nov 17, 2012

References

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