IR detectors of a new type, which use a bimaterial effect to transform IR radiation into optical response, are considered. Several constructions of bimaterial IR detectors, which served as a basis for several matrices of various dimensionalities, are proposed. Operation simulation of bimaterial IR detectors is performed in the ANSYS system. The thermomechanical sensitivity of detectors, which constituted about 100 nm/K, is determined in the course of measurements.
Russian Microelectronics – Springer Journals
Published: Nov 14, 2014
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