Experimental results of depositions of thin Ti, La, Pb, Cd, Mn, Zr, and Y oxide films on the surface of a 50-μm-thick aluminum foil, used for manufacturing electrolytic capacitors by the pyrolysis method of salts of carboxylic acids, are presented. The obtained samples are characterized by capacitance values of 40 to 240 μF/cm2 and electric strength values in an interval of 0.5 to 2 V, except for Ti oxides, whose samples have an electric strength of 2 to 8 V. The obtained capacitance and electric strength values are close to the values possessed by commercially produced aluminum foils with thicknesses of 70–107 μm having an aluminum oxide dielectric on the surface.
Russian Microelectronics – Springer Journals
Published: May 4, 2012
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