Flicker noise spectroscopy in disordered semiconductors is gaining wide acceptance both in physical investigation and in analysis of various microelectronics processes. Its successful use as a diagnostic tool in microtechnology is a result of advances in fundamental studies of flicker noise in semiconductors with disordered structure. In this work, we systematize experimental data for flicker noise phenomena in disordered semiconductors, specifically, in ion-implanted silicon
Russian Microelectronics – Springer Journals
Published: Dec 4, 2007
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