The constructive and design aspects of the thick-film technology, the parameters and properties of materials, and the characteristics of equipment are considered. The manufacturing route of producing microassemblies of microcircuits for the radio engineering hardware of various indentations is presented. It is shown that thick microelectronics films open actual possibilities for developing the miniaturization of the circuitry of vacuum microwave systems, as well as for obtaining the effective solar cells.
Russian Microelectronics – Springer Journals
Published: Sep 3, 2013
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