It is shown that positron annihilation spectroscopy (PAS) is one of the efficient methods for determining the sizes of nanodefects (vacancies, vacancy clusters); free volumes of pores; cavities, and voids; their concentrations and the chemical composition at the annihilation site (location) in nanomaterials and other critical engineering materials. A brief review of experimental studies of nanodefects in porous silicon, silicon, and quartz monocrystal irradiated by protons as well as quartz powders are given.
Russian Microelectronics – Springer Journals
Published: Nov 15, 2009
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