Plasma-Assisted Diffusion Doping of Porous-Silicon Films

Plasma-Assisted Diffusion Doping of Porous-Silicon Films An experiment is conducted on the diffusion of arsenic or phosphorus from an RF plasma into a porous-silicon film intended to serve as a source for the next diffusion step, the film being made by plasma etching or electrolytic anodization. The ultimate goal is to reduce the wafer temperature. It is shown that much lower temperatures are indeed possible with the diffusion technique considered. It is established that doping concentration is more uniform over the wafer surface if pores are arranged regularly, as with porous silicon produced by plasma etching. It is also established that plasma-assisted diffusion is mainly affected by the dispersion of pores in size, total pressure, the partial pressure of the doping agent (AsH3 or PH3), RF power, and wafer temperature. Porous-silicon films doped with As or P by plasma-assisted diffusion could be employed in power devices. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Plasma-Assisted Diffusion Doping of Porous-Silicon Films

Loading next page...
 
/lp/springer_journal/plasma-assisted-diffusion-doping-of-porous-silicon-films-JkT0G5JO5b
Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2004 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/B:RUMI.0000011095.09148.51
Publisher site
See Article on Publisher Site

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches

$49/month

Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.

$588

$360/year

billed annually
Start Free Trial

14-day Free Trial