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Photosensitive materials based on copolymers of vinyl cyclopropyl ether with maleic anhydride

Photosensitive materials based on copolymers of vinyl cyclopropyl ether with maleic anhydride Copolymers prepared from vinyl cyclopropyl ether and maleic anhydride were modified with allyl alcohol, and the products obtained were thermally cross-linked with styrene. Photoresists were prepared from these copolymers, and their photolithographic parameters were determined. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Journal of Applied Chemistry Springer Journals

Photosensitive materials based on copolymers of vinyl cyclopropyl ether with maleic anhydride

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References (3)

Publisher
Springer Journals
Copyright
Copyright © 2008 by Pleiades Publishing, Ltd.
Subject
Chemistry; Industrial Chemistry/Chemical Engineering; Chemistry/Food Science, general
ISSN
1070-4272
eISSN
1608-3296
DOI
10.1134/S1070427208020262
Publisher site
See Article on Publisher Site

Abstract

Copolymers prepared from vinyl cyclopropyl ether and maleic anhydride were modified with allyl alcohol, and the products obtained were thermally cross-linked with styrene. Photoresists were prepared from these copolymers, and their photolithographic parameters were determined.

Journal

Russian Journal of Applied Chemistry – Springer Journals

Published: Jan 19, 2011

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