An experimental investigation is reported on the influence of UV or IR incoherent irradiation on nanolithography by tip-induced local anodic oxidation as applied to titanium films. Both forms of irradiation are found to increase the uniformity of feature sizes and to improve the resolution of the lithographic technique. It is also shown that UV irradiation makes it possible to produce a conducting channel 11 nm wide.
Russian Microelectronics – Springer Journals
Published: Nov 16, 2007
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