Performance of the genetic algorithm in X-ray reflectometry data analysis

Performance of the genetic algorithm in X-ray reflectometry data analysis The effect of the width of the search range of solutions on genetic algorithm performance in the interpretation of X-ray reflectograms has been analyzed. The search algorithm has been optimized, based on the results. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Performance of the genetic algorithm in X-ray reflectometry data analysis

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2011 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739711070110
Publisher site
See Article on Publisher Site

Abstract

The effect of the width of the search range of solutions on genetic algorithm performance in the interpretation of X-ray reflectograms has been analyzed. The search algorithm has been optimized, based on the results.

Journal

Russian MicroelectronicsSpringer Journals

Published: Dec 4, 2011

References

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