PECVD nanocrystalline silicon films versus porous silicon: Structural and optical properties

PECVD nanocrystalline silicon films versus porous silicon: Structural and optical properties A comparative experimental study is conducted of nanocrystalline-and porous-silicon films from the viewpoint of their structural, luminescent, and optical properties, the films being fabricated by PECVD and electrochemical etching, respectively. The x-ray-diffraction data obtained imply that the PECVD films consist of nanocrystals that are uniformly (004) oriented and measure on average 4.8 nm across. It is shown by an AFM investigation that the films have a very rough surface occupied by sharply pointed nanoscale asperities. The films can exhibit room-temperature photoluminescence that is strongest at a photon energy of 1.55 eV. Optical properties of the nanocrystalline-and porous-silicon films are examined in the visible range and the IR. The nanocrystalline-silicon films are found to have similar physical and chemical properties to the porous-silicon films. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

PECVD nanocrystalline silicon films versus porous silicon: Structural and optical properties

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Publisher
Nauka/Interperiodica
Copyright
Copyright © 2007 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739707020059
Publisher site
See Article on Publisher Site

Abstract

A comparative experimental study is conducted of nanocrystalline-and porous-silicon films from the viewpoint of their structural, luminescent, and optical properties, the films being fabricated by PECVD and electrochemical etching, respectively. The x-ray-diffraction data obtained imply that the PECVD films consist of nanocrystals that are uniformly (004) oriented and measure on average 4.8 nm across. It is shown by an AFM investigation that the films have a very rough surface occupied by sharply pointed nanoscale asperities. The films can exhibit room-temperature photoluminescence that is strongest at a photon energy of 1.55 eV. Optical properties of the nanocrystalline-and porous-silicon films are examined in the visible range and the IR. The nanocrystalline-silicon films are found to have similar physical and chemical properties to the porous-silicon films.

Journal

Russian MicroelectronicsSpringer Journals

Published: Mar 30, 2007

References

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