Parameters and composition of HBr plasma under the conditions of glow DC discharge

Parameters and composition of HBr plasma under the conditions of glow DC discharge A model investigation of parameters and steady-state composition of the HBr plasma under conditions of a dc glow discharge (p = 30–250 Pa, i d = 10–30 mA) is performed. The calculated data by the composition of the neutral and ion components of the plasma are obtained. It is found that the balance of neutral particles is largely formed by radical chain processes. It is shown that the dissociative adherence of electrons to HBrV > 0 does not exert a determining effect on the kinetics of the processes of the formation-loss of charged particles because of low concentrations of vibrationally excited molecules. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Parameters and composition of HBr plasma under the conditions of glow DC discharge

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Publisher
Springer Journals
Copyright
Copyright © 2010 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739710060077
Publisher site
See Article on Publisher Site

Abstract

A model investigation of parameters and steady-state composition of the HBr plasma under conditions of a dc glow discharge (p = 30–250 Pa, i d = 10–30 mA) is performed. The calculated data by the composition of the neutral and ion components of the plasma are obtained. It is found that the balance of neutral particles is largely formed by radical chain processes. It is shown that the dissociative adherence of electrons to HBrV > 0 does not exert a determining effect on the kinetics of the processes of the formation-loss of charged particles because of low concentrations of vibrationally excited molecules.

Journal

Russian MicroelectronicsSpringer Journals

Published: Nov 11, 2010

References

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