A model investigation of parameters and steady-state composition of the HBr plasma under conditions of a dc glow discharge (p = 30–250 Pa, i d = 10–30 mA) is performed. The calculated data by the composition of the neutral and ion components of the plasma are obtained. It is found that the balance of neutral particles is largely formed by radical chain processes. It is shown that the dissociative adherence of electrons to HBrV > 0 does not exert a determining effect on the kinetics of the processes of the formation-loss of charged particles because of low concentrations of vibrationally excited molecules.
Russian Microelectronics – Springer Journals
Published: Nov 11, 2010
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