Optimization of the tomographic algorithm of the reconstruction of plasma irregularities in process reactors of microelectronics

Optimization of the tomographic algorithm of the reconstruction of plasma irregularities in... In this article, an algorithm of two-aspect emission optical tomography of plasma taking into account apriori data about the object of investigation is developed. The reconstruction algorithm was tested for statistically large number of phantoms. The cases of incorrect operation of the suggested algorithm were revealed and the methods of its improvement were suggested. The improved algorithm of emission optical tomography compatible with industrial plasmochemical reactors of low-temperature plasma allows us to reconstruct a two-dimensional distribution of plasma particles with the reconstruction error lower than 15% for 90% of randomly selected phantoms. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Optimization of the tomographic algorithm of the reconstruction of plasma irregularities in process reactors of microelectronics

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2011 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S106373971102003X
Publisher site
See Article on Publisher Site

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