In this article, an algorithm of two-aspect emission optical tomography of plasma taking into account apriori data about the object of investigation is developed. The reconstruction algorithm was tested for statistically large number of phantoms. The cases of incorrect operation of the suggested algorithm were revealed and the methods of its improvement were suggested. The improved algorithm of emission optical tomography compatible with industrial plasmochemical reactors of low-temperature plasma allows us to reconstruct a two-dimensional distribution of plasma particles with the reconstruction error lower than 15% for 90% of randomly selected phantoms.
Russian Microelectronics – Springer Journals
Published: Mar 30, 2011
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