The state of polarization of ferroelectric thin films differing in structure is determined by optical second-harmonic microscopy. The ferroelectric is lead zirconate titanate, Pb x (Zr0.53Ti0.47)O3. The structural differences are produced by changing the fabrication conditions. In addition, the electrical properties of the same films are evaluated by conventional methods. Optical second-harmonic micrographs of the films and local optical-hysteresis loops are obtained. From the latter data, local dielectric-hysteresis loops are computed. A spatial resolution better than 1 μm is achieved.
Russian Microelectronics – Springer Journals
Published: Oct 10, 2004
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