Optical Second-Harmonic Microscopy Applied to the Local Probing of the State of Polarization in Thin Films of Lead Zirconate Titanate

Optical Second-Harmonic Microscopy Applied to the Local Probing of the State of Polarization in... The state of polarization of ferroelectric thin films differing in structure is determined by optical second-harmonic microscopy. The ferroelectric is lead zirconate titanate, Pb x (Zr0.53Ti0.47)O3. The structural differences are produced by changing the fabrication conditions. In addition, the electrical properties of the same films are evaluated by conventional methods. Optical second-harmonic micrographs of the films and local optical-hysteresis loops are obtained. From the latter data, local dielectric-hysteresis loops are computed. A spatial resolution better than 1 μm is achieved. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Optical Second-Harmonic Microscopy Applied to the Local Probing of the State of Polarization in Thin Films of Lead Zirconate Titanate

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Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2001 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1012533230469
Publisher site
See Article on Publisher Site

Abstract

The state of polarization of ferroelectric thin films differing in structure is determined by optical second-harmonic microscopy. The ferroelectric is lead zirconate titanate, Pb x (Zr0.53Ti0.47)O3. The structural differences are produced by changing the fabrication conditions. In addition, the electrical properties of the same films are evaluated by conventional methods. Optical second-harmonic micrographs of the films and local optical-hysteresis loops are obtained. From the latter data, local dielectric-hysteresis loops are computed. A spatial resolution better than 1 μm is achieved.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 10, 2004

References

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