On the issue of an equivalent oxide thickness evaluation in nanoscale MISFETs

On the issue of an equivalent oxide thickness evaluation in nanoscale MISFETs The refinement of the evaluation formula for an equivalent oxide thickness in the case of a multi-layer gate insulator is obtained, taking into account a polarity effect in the suboxide layer at the Si/high-K dielectric interface. Calculated semiclassically and associated with the polarization dipole mechanism, the correction is negative and does not exceed 6%. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

On the issue of an equivalent oxide thickness evaluation in nanoscale MISFETs

Loading next page...
 
/lp/springer_journal/on-the-issue-of-an-equivalent-oxide-thickness-evaluation-in-nanoscale-f7aHFsPQAt
Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2011 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739711010033
Publisher site
See Article on Publisher Site

Abstract

The refinement of the evaluation formula for an equivalent oxide thickness in the case of a multi-layer gate insulator is obtained, taking into account a polarity effect in the suboxide layer at the Si/high-K dielectric interface. Calculated semiclassically and associated with the polarization dipole mechanism, the correction is negative and does not exceed 6%.

Journal

Russian MicroelectronicsSpringer Journals

Published: Jan 15, 2011

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve Freelancer

DeepDyve Pro

Price
FREE
$49/month

$360/year
Save searches from
Google Scholar,
PubMed
Create lists to
organize your research
Export lists, citations
Read DeepDyve articles
Abstract access only
Unlimited access to over
18 million full-text articles
Print
20 pages/month
PDF Discount
20% off