On the essence of the high photosensitivity of a-Si:H layered films

On the essence of the high photosensitivity of a-Si:H layered films It is established that layered a-Si:H films grown by cyclic deposition with by-layer annealing in hydrogen plasma are characterized by high photosensitivity, which, at room temperature, exceeds by more than an order of magnitude the photosensitivity of regular nondoped a-Si:H films grown by deposition in the plasma of an HF glowing discharge. The high photosensitivity is determined by small dark conductance and the high photoconductance of layered films in the range of room temperature. It is demonstrated that this can be stipulated by the existence of sensitizing levels, related with higher oxygen concentrations at layer’s interface and the low concentration of broken silicon bonds in the depth of layers with a more ordered structure. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

On the essence of the high photosensitivity of a-Si:H layered films

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Publisher
Springer Journals
Copyright
Copyright © 2011 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739711080129
Publisher site
See Article on Publisher Site

Abstract

It is established that layered a-Si:H films grown by cyclic deposition with by-layer annealing in hydrogen plasma are characterized by high photosensitivity, which, at room temperature, exceeds by more than an order of magnitude the photosensitivity of regular nondoped a-Si:H films grown by deposition in the plasma of an HF glowing discharge. The high photosensitivity is determined by small dark conductance and the high photoconductance of layered films in the range of room temperature. It is demonstrated that this can be stipulated by the existence of sensitizing levels, related with higher oxygen concentrations at layer’s interface and the low concentration of broken silicon bonds in the depth of layers with a more ordered structure.

Journal

Russian MicroelectronicsSpringer Journals

Published: Dec 9, 2011

References

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