Obtaining multicomponent films by the plasma-stimulated method

Obtaining multicomponent films by the plasma-stimulated method A new plasma-stimulated method for obtaining multicomponent films of alloys of rare-earth and transition metals that are uniform in terms of their chemical composition is proposed. The obtained experimental data are in good agreement with the suggested theoretical model. It is shown how to control the physical properties of multicomponent films by varying the relative quantitative content of the film components. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Obtaining multicomponent films by the plasma-stimulated method

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2009 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739709030020
Publisher site
See Article on Publisher Site

Abstract

A new plasma-stimulated method for obtaining multicomponent films of alloys of rare-earth and transition metals that are uniform in terms of their chemical composition is proposed. The obtained experimental data are in good agreement with the suggested theoretical model. It is shown how to control the physical properties of multicomponent films by varying the relative quantitative content of the film components.

Journal

Russian MicroelectronicsSpringer Journals

Published: May 17, 2009

References

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