A review is presented of noncontact temperature-measurement methods for dielectrics and semiconductors in the monocrystalline and the vitreous state, as well as in the form of porous ceramic or vacuum-deposited coating. Extensive coverage is given to the use of the spectral dependence of the linear absorption coefficient and the refractive index. Recommendations are made for selection of a spectral range of temperature measurement on the surface and a thin surface layer of different materials. Approaches are considered to determining temperature fields in the bulk of dielectrics and semiconductors.
Russian Microelectronics – Springer Journals
Published: Feb 19, 2005
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