Some results on the creation of ultraviolet light-emitting diodes based on GaN/AlGaN heterostructures grown on aluminum nitride (AlN) substrates using the method of chloride-hydride epitaxy are presented. The peak wavelengths lie within the range of 360–365 nm, the width of a spectral curve is 10–13 nm, and the output optical power of light-emitting diode chips is 50 mW at a current of 350 mA.
Russian Microelectronics – Springer Journals
Published: Nov 14, 2013
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