Multiplex Fourier-transform spectroscopy in the characterization of stochastic inhomogeneous film growth: A conceptual framework

Multiplex Fourier-transform spectroscopy in the characterization of stochastic inhomogeneous film... A conceptual framework is discussed of multiplex Fourier-transform optical noise spectroscopy as applied to the characterization of laterally inhomogeneous stochastic processes associated with film growth. A Fourier-transform relationship is revealed between reflected-intensity noise spectrum and the distributions of surface centers in growth time, size, growth rate, etc. This finding suggests an application of multiplex Fouriertransform spectroscopy to the characterization of growing films by random reflection of laser radiation. The technique developed could be useful for the in situ monitoring of process spread in etching. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Multiplex Fourier-transform spectroscopy in the characterization of stochastic inhomogeneous film growth: A conceptual framework

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Publisher
Nauka/Interperiodica
Copyright
Copyright © 2006 by Pleiades Publishing, Inc.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739706020065
Publisher site
See Article on Publisher Site

Abstract

A conceptual framework is discussed of multiplex Fourier-transform optical noise spectroscopy as applied to the characterization of laterally inhomogeneous stochastic processes associated with film growth. A Fourier-transform relationship is revealed between reflected-intensity noise spectrum and the distributions of surface centers in growth time, size, growth rate, etc. This finding suggests an application of multiplex Fouriertransform spectroscopy to the characterization of growing films by random reflection of laser radiation. The technique developed could be useful for the in situ monitoring of process spread in etching.

Journal

Russian MicroelectronicsSpringer Journals

Published: Mar 21, 2006

References

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