MOS integrated piezoresistive microsensors

MOS integrated piezoresistive microsensors A comparative performance analysis is reported that addresses different circuit configurations of MOS integrated piezoresistive microsensor. It is proposed that circuit configurations be evaluated in terms of two sensitivities to process-induced spread in circuit parameters as well as in terms of piezoresistive sensitivity. The sensitivities are calculated subject to circuit-parameter correlation. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

MOS integrated piezoresistive microsensors

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Publisher
Springer Journals
Copyright
Copyright © 2005 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1007/s11180-005-0008-5
Publisher site
See Article on Publisher Site

Abstract

A comparative performance analysis is reported that addresses different circuit configurations of MOS integrated piezoresistive microsensor. It is proposed that circuit configurations be evaluated in terms of two sensitivities to process-induced spread in circuit parameters as well as in terms of piezoresistive sensitivity. The sensitivities are calculated subject to circuit-parameter correlation.

Journal

Russian MicroelectronicsSpringer Journals

Published: Feb 19, 2005

References

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