Interaction between a high-power microwave and a planar layer of a low-pressure magnetoactive plasma under electron cyclotron resonance (ECR) conditions was studied. Results of numerical simulation of the one-dimensional problem are presented. Two modes of wave–plasma interaction were found. The use of these modes and their associated microwave plasmatrons in fabricating high-density ICs is discussed.
Russian Microelectronics – Springer Journals
Published: Aug 1, 2014
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