Microwave characterization of undoped polycrystalline silicon

Microwave characterization of undoped polycrystalline silicon An experiment is conducted to evaluate a contactless nondestructive microwave technique for the characterization of polycrystalline silicon (poly-Si). The technique involves measuring the resonant frequency and Q factor of a microwave cavity containing a poly-Si specimen, on which basis the relative permittivity εr and the dissipation factor tanδ are calculated. The results obtained indicate that the technique could be helpful in assessing the quality of undoped poly-Si ingots to be used as a source material in the float-zone growth of Si single crystals of high resistivity. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Microwave characterization of undoped polycrystalline silicon

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Publisher
Nauka/Interperiodica
Copyright
Copyright © 2006 by Pleiades Publishing, Inc.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739706060023
Publisher site
See Article on Publisher Site

Abstract

An experiment is conducted to evaluate a contactless nondestructive microwave technique for the characterization of polycrystalline silicon (poly-Si). The technique involves measuring the resonant frequency and Q factor of a microwave cavity containing a poly-Si specimen, on which basis the relative permittivity εr and the dissipation factor tanδ are calculated. The results obtained indicate that the technique could be helpful in assessing the quality of undoped poly-Si ingots to be used as a source material in the float-zone growth of Si single crystals of high resistivity.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 26, 2006

References

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