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Microsystems Engineering: A Great Stride Forward in Microelectronics Technology

Microsystems Engineering: A Great Stride Forward in Microelectronics Technology The development of new-generation technological and engineering concepts by the example of “microsystems technology” and “microsystems engineering” approaches is considered. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Microsystems Engineering: A Great Stride Forward in Microelectronics Technology

Russian Microelectronics , Volume 30 (1) – Oct 10, 2004

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References (3)

Publisher
Springer Journals
Copyright
Copyright © 2001 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
DOI
10.1023/A:1009465607395
Publisher site
See Article on Publisher Site

Abstract

The development of new-generation technological and engineering concepts by the example of “microsystems technology” and “microsystems engineering” approaches is considered.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 10, 2004

There are no references for this article.