Microelectromechanical System for Controlling Flow Past an Airfoil: Pressure Transducers

Microelectromechanical System for Controlling Flow Past an Airfoil: Pressure Transducers A technology is developed for making single-chip diaphragm pressure sensors with polycrystalline-silicon piezoresistive elements on a monocrystalline-silicon substrate. It allows one to produce piezoresistive elements with a conductivity–temperature characteristic that neutralizes the temperature dependence of piezoresistive sensitivity. Sensors with a 1.8 × 1.8-mm2 diaphragm are designed and fabricated by the above technology for pressures ranging from 1 to 105 Pa, showing a maximum sensitivity of 10–6 Pa–1. The sensors are tested in aerodynamic experiments on monitoring the flow past a model wing of finite span at angles of attack close to the stall angle. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Microelectromechanical System for Controlling Flow Past an Airfoil: Pressure Transducers

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Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2002 by MAIK "Nauka/Interperiodica"
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1020929808634
Publisher site
See Article on Publisher Site

Abstract

A technology is developed for making single-chip diaphragm pressure sensors with polycrystalline-silicon piezoresistive elements on a monocrystalline-silicon substrate. It allows one to produce piezoresistive elements with a conductivity–temperature characteristic that neutralizes the temperature dependence of piezoresistive sensitivity. Sensors with a 1.8 × 1.8-mm2 diaphragm are designed and fabricated by the above technology for pressures ranging from 1 to 105 Pa, showing a maximum sensitivity of 10–6 Pa–1. The sensors are tested in aerodynamic experiments on monitoring the flow past a model wing of finite span at angles of attack close to the stall angle.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 13, 2004

References

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