Methods of parallel integration of carbon nanotubes during the formation of functional devices for microelectronics and sensor technologies

Methods of parallel integration of carbon nanotubes during the formation of functional devices... Methods of formation of thin film structures and sensor elements based on carbon nanotubes have been developed. Methods of integration using deposition from solutions, probe micromechanics and the electrokinetic positioning of nanotubes providing compatibility with traditional microelectronic technology, are suggested. Peculiarities of the parallel integration of carbon nanotubes in the process of formation of thin films, networks, and individual conduction channels are revealed. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Methods of parallel integration of carbon nanotubes during the formation of functional devices for microelectronics and sensor technologies

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Publisher
Springer Journals
Copyright
Copyright © 2009 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739709050047
Publisher site
See Article on Publisher Site

Abstract

Methods of formation of thin film structures and sensor elements based on carbon nanotubes have been developed. Methods of integration using deposition from solutions, probe micromechanics and the electrokinetic positioning of nanotubes providing compatibility with traditional microelectronic technology, are suggested. Peculiarities of the parallel integration of carbon nanotubes in the process of formation of thin films, networks, and individual conduction channels are revealed.

Journal

Russian MicroelectronicsSpringer Journals

Published: Sep 19, 2009

References

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