An earlier developed model for a neutralization channel of a plasma source of neutral beams is applied to the case of an inclined neutralization channel. The energy and angular characteristics of the output beam are presented together with the neutralization factor as a function of the length and inclination angle of the channel. Strong angular separation of ions and fast neutral particles is observed in the sources of this design. Under a restricted range of angles of the output beam, this effect allows one to efficiently remove a considerable part of the ions from the output beam, thus increasing the neutralization factor.
Russian Microelectronics – Springer Journals
Published: May 17, 2009
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