An experimental investigation is reported into the influence of the grain structure of a starting Al film on the surface and bulk structure of the resulting porous anodic-oxide film with a view to making pore arrays based on oxide thin films. The electrolytes employed essentially contain a rare-earth metal. Anodic-oxide films are obtained with thicknesses ranging from 1.0 to 2.5 µm and with a cell diameter uniform within 8% over an area of 5 × 5 µm2, the grain diameter of the Al film being 0.60–0.83 µm.
Russian Microelectronics – Springer Journals
Published: May 19, 2005
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