LPCVD borophosphosilicate-glass films: Deposition and properties

LPCVD borophosphosilicate-glass films: Deposition and properties For the first time, an investigation is carried out into the mid-temperature chemical vapor deposition of phosphosilicate-and borophosphosilicate-glass (BPSG) films from the tetraethylorthosilicate-dimethylphosphite-triethylborate (trimethylborate) system, as well as a characterization of the films themselves. The processes are effected in a Karat low-pressure reactor provided with a specifically designed feeder for each liquid reagent, operating by bubbling evaporation. It is shown that using dimethylphosphite allows the phosphorus concentration in films to be controlled over a wide range. Optimum ranges are identified for the B and P concentrations in films—CB and CP—from the viewpoint of thermal-flow planarization and structural stability of films in storage. Specifically, the concentrations should be such that CB + CP = 8.7 ± 0.3 wt % and CP = 3.0 to 3.8 wt %. It is established that with the reactant system employed there is no depletion of phosphorus in films along the deposition zone, and CB + CP is almost uniform. Under the stated conditions, BPSG deposition proceeds at a rate of 9.0–10.0 nm/min, and individual films thus obtained are highly uniform in thickness and have a density of 2.3 g/cm3. They show a mirror-like surface to indicate a very low degree of surface roughness. They are less reactive with moisture. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

LPCVD borophosphosilicate-glass films: Deposition and properties

Loading next page...
Copyright © 2007 by Pleiades Publishing, Ltd.
Engineering; Electronic and Computer Engineering
Publisher site
See Article on Publisher Site


You’re reading a free preview. Subscribe to read the entire article.

DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches


Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.



billed annually
Start Free Trial

14-day Free Trial