SIMOX structures were subjected to low-temperature annealing under a temperature gradient in a mild (with a low oxygen content) atmosphere. The effect of the temperature gradient on the oxygen distribution was studied. The oxygen distributions obtained under oppositely directed gradients (∇T = ±100 degree/cm) were found to substantially differ from each other. Possible mechanisms of formation of buried insulating layers in an inhomogeneous temperature field are discussed.
Russian Microelectronics – Springer Journals
Published: Dec 4, 2007
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