Local Ellipsometric Inspection of Small Windows

Local Ellipsometric Inspection of Small Windows A method to determine residual-film thickness for micrometer-sized windows in a multilayer on a substrate with known optical properties is described. The method can be implemented with commercially available ellipsometers providing a resolution of about 5 × 10 μm2. Equations to calculate the thickness are derived. The method is evaluated on the basis of mathematical models. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Local Ellipsometric Inspection of Small Windows

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Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2002 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1014349611219
Publisher site
See Article on Publisher Site

References

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