Linear standards for the calibration of SEMs and AFMs are reviewed. Requirements to a surface pattern designed to serve as a universal standard for the above purpose are defined. A trapezoidal pitch structure is proposed, in which the sidewalls of basic units essentially make a large angle with the normal to the surface. Its uses in SEM–AFM dimensional metrology are considered. A new, universal standard implementing the structure is described. Its certification is briefly reported. SEM and AFM experiments with the standard are presented.
Russian Microelectronics – Springer Journals
Published: Oct 13, 2004
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