Investigation of the BF3 plasma particle’s lateral distribution using two-view emission tomography

Investigation of the BF3 plasma particle’s lateral distribution using two-view emission tomography The uniformity of the (BF3 + 2% Ar) plasma is investigated by the two-view emission’s optical tomography in an experimental plasma-chemical reactor. This made it possible to reconstruct the lateral concentration distribution of both the ion plasma component B+ and free radicals F*. To investigate the possibilities of a tomographic algorithm, the experiment was performed at various pressures in the reactor chamber, an asymmetric gas input was used, artificial nonuniformities of the near-wall magnetic field were introduced, and the influence of the silicon wafer on the lateral particle’s distribution was investigated. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Investigation of the BF3 plasma particle’s lateral distribution using two-view emission tomography

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Publisher
Springer Journals
Copyright
Copyright © 2014 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739714060043
Publisher site
See Article on Publisher Site

Abstract

The uniformity of the (BF3 + 2% Ar) plasma is investigated by the two-view emission’s optical tomography in an experimental plasma-chemical reactor. This made it possible to reconstruct the lateral concentration distribution of both the ion plasma component B+ and free radicals F*. To investigate the possibilities of a tomographic algorithm, the experiment was performed at various pressures in the reactor chamber, an asymmetric gas input was used, artificial nonuniformities of the near-wall magnetic field were introduced, and the influence of the silicon wafer on the lateral particle’s distribution was investigated.

Journal

Russian MicroelectronicsSpringer Journals

Published: Nov 12, 2014

References

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