The uniformity of the (BF3 + 2% Ar) plasma is investigated by the two-view emission’s optical tomography in an experimental plasma-chemical reactor. This made it possible to reconstruct the lateral concentration distribution of both the ion plasma component B+ and free radicals F*. To investigate the possibilities of a tomographic algorithm, the experiment was performed at various pressures in the reactor chamber, an asymmetric gas input was used, artificial nonuniformities of the near-wall magnetic field were introduced, and the influence of the silicon wafer on the lateral particle’s distribution was investigated.
Russian Microelectronics – Springer Journals
Published: Nov 12, 2014
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