Integrated Laser Measuring System for the Ellipsometric and Photovoltage Characterization of Thin Surface Layers

Integrated Laser Measuring System for the Ellipsometric and Photovoltage Characterization of Thin... An integrated computer-based measuring system is designed, assembled, and tested that combines ellipsometry with photovoltage measurements, using a semiconductor laser as the light source. It enables one to simultaneously measure the thickness and photovoltage-related properties of a micrometer-sized region selected in a thin surface layer. The system also gives computer-generated perspective images of the region examined. Both phase and intensity light modulation are provided by an electro-optical modulator operated over a wide frequency range. It is established that combining the two measurement techniques is a useful method for (i) detecting microscopic surface defects which cannot be revealed by purely optical methods and (ii) evaluating the semiconductor properties of thin surface layers. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Integrated Laser Measuring System for the Ellipsometric and Photovoltage Characterization of Thin Surface Layers

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Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2003 by MAIK Nauka/Interperiodica
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1027346027904
Publisher site
See Article on Publisher Site

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