Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system

Influence of external conditions on physical processes and plasma parameters in a model of a... The results of the experimental investigation into parameters of the helicon discharge plasma in a model of high-frequency hybrid plasma system equipped with a solenoidal antenna are presented. It is shown that an increase in the external magnetic field causes the formation of the plasma column and the displacement of the ion current over the discharge axis towards the lower model flange. The variation in the magnetic field configuration makes it possible to control the shape of the plasma column. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system

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Publisher
Springer Journals
Copyright
Copyright © 2016 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739716050024
Publisher site
See Article on Publisher Site

Abstract

The results of the experimental investigation into parameters of the helicon discharge plasma in a model of high-frequency hybrid plasma system equipped with a solenoidal antenna are presented. It is shown that an increase in the external magnetic field causes the formation of the plasma column and the displacement of the ion current over the discharge axis towards the lower model flange. The variation in the magnetic field configuration makes it possible to control the shape of the plasma column.

Journal

Russian MicroelectronicsSpringer Journals

Published: Feb 9, 2017

References

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