The influence of buffer layers formed at different temperatures and ratios of elements of groups V and III (V/III) on crystalline perfection of epitaxial layers AlN grown using the MOS-Hydride Epitaxy Method on the templates α-Al2O3 is considered. It is shown that the most efficient method to increase the structural perfection of epitaxial layers is use of the high-temperature buffer layer on a low V/III ratio. Further improvement of the quality of AlN layers is possible due to the reduction of parasitic reactions between ammonia and trimethylaluminum in the gas phase by means of optimization of the gas flow through the reactor. The specified values of the growth parameters permitted obtaining the AlN layers of the high crystalline perfection (half-width of X-ray swing curves for reflections (0002), (0004) and $(10\bar 13)$ made asec of 50, 97 and 202, respectively) with a good root-mean-square roughness of the surface of 0.7 nm applicable for the creation of instruments based thereon.
Russian Microelectronics – Springer Journals
Published: Nov 26, 2014
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