In-situ stitching interferometric test system for large plano optics

In-situ stitching interferometric test system for large plano optics In-situ testing is an ideal technology for improving the precision and efficiency of fabrication. We developed an in-situ subaperture stitching interferometric test system for large plano optics in the workshop environment with high precision and satisfactory repeatability. In this paper, we provide a brief account of this system and the principle of in-situ subaperture stitching measurement. Several validation tests are presented, which demonstrate that the developed system is capable of realizing in-situ testing. The size of optical flats can be measured is up to 420 mm × 780 mm, and repeatability is smaller than 0.03λ. The paper also discusses the necessary requirements for a suitable workshop environment for ensuring that the tests are stable and reliable. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Advances in Manufacturing Springer Journals

In-situ stitching interferometric test system for large plano optics

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Publisher
Shanghai University
Copyright
Copyright © 2018 by Shanghai University and Springer-Verlag GmbH Germany, part of Springer Nature
Subject
Engineering; Manufacturing, Machines, Tools; Control, Robotics, Mechatronics; Nanotechnology and Microengineering
ISSN
2095-3127
eISSN
2195-3597
D.O.I.
10.1007/s40436-018-0220-2
Publisher site
See Article on Publisher Site

Abstract

In-situ testing is an ideal technology for improving the precision and efficiency of fabrication. We developed an in-situ subaperture stitching interferometric test system for large plano optics in the workshop environment with high precision and satisfactory repeatability. In this paper, we provide a brief account of this system and the principle of in-situ subaperture stitching measurement. Several validation tests are presented, which demonstrate that the developed system is capable of realizing in-situ testing. The size of optical flats can be measured is up to 420 mm × 780 mm, and repeatability is smaller than 0.03λ. The paper also discusses the necessary requirements for a suitable workshop environment for ensuring that the tests are stable and reliable.

Journal

Advances in ManufacturingSpringer Journals

Published: May 19, 2018

References

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