A theoretical model of capture and surface segregation of an impurity during MBE doping is proposed. It is assumed that an impurity is incorporated in the surface layer of a crystal doped due to both the blocking of the impurity atom by host atoms in kinks on steps and the exchange between the impurity atoms adsorbed and the host atoms in the surface layer. The surface segregation is considered as an accumulation of an impurity in the adsorption layer due to the jumps of impurity atoms adsorbed over the steps and the migration of impurity atoms from the surface layer into the adsorption layer. It is shown that an increase in the supersaturation near a step with a drop in the temperature and an increase in the growth rate suppresses the surface segregation, due to the more effective impurity blocking in the kinks. The formation of 2D islands on the terraces and nonequilibrium kinks at the island edges results in a partial drop of the supersaturation and weakening of the temperature and growth rate effects on the surface segregation. When impurity atoms intensively migrate from the surface layer to the adsorption one, the blurring of the doping profile sharply (superexponentially) increases with the temperature. This is connected with the exponential dependence of the probability of an impurity immuring in the surface layer by a moving step on the rate constant of the impurity migration from the surface layer into the adsorption one. The model reproduces typical dependences of the width of the doping transition’s concentration region on the temperature and growth rate obtained in experiments on Sb-doping of Si.
Russian Microelectronics – Springer Journals
Published: Nov 26, 2014
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera