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ISSN 10637397, Russian Microelectronics, 2014, Vol. 43, No. 4, pp. 277–283. © Pleiades Publishing, Ltd., 2014. Original Russian Text © A.S. Rudyi, A.N. Kulikov, D.A. Kulikov, A.V. Metlitskaya, 2014, published in Mikroelektronika, 2014, Vol. 43, No. 4, pp. 282–288. A. S. Rudyi, A. N. Kulikov, D. A. Kulikov, and A. V. Metlitskaya Yaroslavl State University N.A. Demidov, ul. Sovetskaya 14, Yaroslavl, 150000 Russia email: rudy@univ.uniyar.ac.ru Received September 20, 2013 DOI: 10.1134/S1063739714040106 INTRODUCTION tain refinements and, as shown in this study, can pro pose a more complex dynamics of solutions. In partic This article is the continuation of studies [1–4]. ular, this is the possibility of appearance of highmode The authors of [1] proposed and the authors of [2] wave solutions with a sufficiently small wavelength. took into account one deterministic model of surface erosion under the effect of an ion beam. Currently, The formation of wave nanorelief (WNR) on the another model of this production process is known. surface of solids is referred to as the most interesting This is the Bradley–Harper (BH) model [5], which is and least studied phenomena. The wave relief is based on the nonlinear differential equation with par formed on the surface of conductors,
Russian Microelectronics – Springer Journals
Published: Jul 15, 2014
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