Geometric aspects of AFM imaging

Geometric aspects of AFM imaging A geometric study of image generation in the AFM is reported. The relationship of an AFM waveform to the surface morphology being examined is determined, allowing for the influence of the radius and the vertex and obliquity angles of the tip. AFM calibration procedures are proposed and experimentally validated on trapezoidal surface patterns. Methods are described for direct measurement of linear dimensions, including linewidth, on the basis of original and differentiated AFM waveforms. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Geometric aspects of AFM imaging

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2008 by MAIK Nauka
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739708060061
Publisher site
See Article on Publisher Site

Abstract

A geometric study of image generation in the AFM is reported. The relationship of an AFM waveform to the surface morphology being examined is determined, allowing for the influence of the radius and the vertex and obliquity angles of the tip. AFM calibration procedures are proposed and experimentally validated on trapezoidal surface patterns. Methods are described for direct measurement of linear dimensions, including linewidth, on the basis of original and differentiated AFM waveforms.

Journal

Russian MicroelectronicsSpringer Journals

Published: Nov 8, 2008

References

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