This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given.
Russian Microelectronics – Springer Journals
Published: Sep 12, 2014
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