Generation of fast neutral beams based on closed drift ion sources

Generation of fast neutral beams based on closed drift ion sources This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Generation of fast neutral beams based on closed drift ion sources

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Publisher
Pleiades Publishing
Copyright
Copyright © 2014 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739714040052
Publisher site
See Article on Publisher Site

Abstract

This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given.

Journal

Russian MicroelectronicsSpringer Journals

Published: Sep 12, 2014

References

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