An experimental investigation is conducted into the formation Ge nanoclusters by heat treatment of germanosilicate-glass (Si x Ge y O z ) films that are produced by oxidation of Ge-doped nanostructured polysilicon. It employs Auger and IR spectroscopy, high-resolution electron microscopy, and x-ray diffraction. The process by which Ge atoms in the films are transported toward the substrate is found to include the following stages: (1) the formation of a GeO2 and a SiO2 phase, (2) the reduction of GeO2 to Ge by Si, (3) Ge-crystallite nucleation, and (4) Ge-crystallite growth. Heat treatment in humid oxygen at ≥ 800°C is found to increase Ge-nanocluster size, the point of crystallization being 500°C. It is established that heat treatment at a temperature close to the Ge melting point results in complete aggregation of the germanium into clusters, with a twofold increase in both the mean size and the number of clusters. Germanium is found to accumulate at the interface between oxidized and unoxidized polysilicon.
Russian Microelectronics – Springer Journals
Published: Mar 28, 2009
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera