Gas-phase etching of SiO2 layers in an HF/C2H5OH mixture

Gas-phase etching of SiO2 layers in an HF/C2H5OH mixture This paper describes a technique for dry etching SiO2 layers in MEMS technologies without the moving elements sticking. Etching the sacrificial SiO2 in anhydrous HF (hydrofluoric acid in the gas phase) allows avoiding the subsequent complex operations of cleaning and drying, which are mandatory in the case of liquid etching. Using the HF/C2H5OH anhydrous mixture under low pressures makes it possible to prevent water condensation, which is due to etching in HF vapor, and allows one to employ gas-phase etching in surface MEMS technologies. The mechanisms and physicochemical processes taking place when etching thermal SiO2 are discussed. The rate of etching thermal SiO2 films is investigated at temperatures ranging from 30 to 50°С and under chamber pressures ranging from 10 to 20 kPa. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Gas-phase etching of SiO2 layers in an HF/C2H5OH mixture

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Publisher
Pleiades Publishing
Copyright
Copyright © 2017 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739717010097
Publisher site
See Article on Publisher Site

Abstract

This paper describes a technique for dry etching SiO2 layers in MEMS technologies without the moving elements sticking. Etching the sacrificial SiO2 in anhydrous HF (hydrofluoric acid in the gas phase) allows avoiding the subsequent complex operations of cleaning and drying, which are mandatory in the case of liquid etching. Using the HF/C2H5OH anhydrous mixture under low pressures makes it possible to prevent water condensation, which is due to etching in HF vapor, and allows one to employ gas-phase etching in surface MEMS technologies. The mechanisms and physicochemical processes taking place when etching thermal SiO2 are discussed. The rate of etching thermal SiO2 films is investigated at temperatures ranging from 30 to 50°С and under chamber pressures ranging from 10 to 20 kPa.

Journal

Russian MicroelectronicsSpringer Journals

Published: Mar 23, 2017

References

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