GaAs Pixel-Detector Technology for X-ray Medical Imaging: A Review

GaAs Pixel-Detector Technology for X-ray Medical Imaging: A Review An attempt is made to analyze and summarize the literature data on hybrid x-ray GaAs pixel detectors designed for medical imaging. Criteria are stated for selecting a semiconductor material. It is shown that GaAs is currently preferable to the other semiconductor materials. Detector figures of merit used to select a semiconductor material and a process technology are listed. Major types of x-ray detector based on bulk-grown or epitaxial GaAs are described, namely, the planar Schottky, the planar p-i-n, and the 3D detector. The influence is considered of different process steps (contact formation, passivation coating, hybridization, etc.) on detector figures of merit. Monolithic technology is briefly discussed. Russian Microelectronics Springer Journals

GaAs Pixel-Detector Technology for X-ray Medical Imaging: A Review

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Copyright © 2005 by MAIK “Nauka/Interperiodica”
Engineering; Electrical Engineering
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