Formation of the nickel-platinum alloy silicide Schottky barriers

Formation of the nickel-platinum alloy silicide Schottky barriers We propose a new technique for the Schottky barrier formation that involves magnetron deposition of a thin film from a multicomponent target consisting of vanadium, platinum, and nickel onto silicon and the subsequent stage thermal treatment. Using the developed technique, we fabricated device structures with the 0.69–0.71-V-high Schottky barriers. It is established that the barrier layer comprises the Ni1 − x Pt x Si silicide phase and about 2 at % of platinum in the contact region. We show that the amount of platinum at the interface with silicon determines the barrier’s height. The highest platinum content at the interface is ensured at the two-stage thermal treatment at a first stage temperature of 240–300°C. The use of the two-stage thermal treatment in the silicide formation in the system’s silicon-composite Ni-Pt-V alloy allows obtaining a silicide layer with higher structural quality and a better silicon/silicide interface than the one-stage treatment can yield. Russian Microelectronics Springer Journals

Formation of the nickel-platinum alloy silicide Schottky barriers

Loading next page...
Springer US
Copyright © 2014 by Pleiades Publishing, Ltd.
Engineering; Electrical Engineering
Publisher site
See Article on Publisher Site


You’re reading a free preview. Subscribe to read the entire article.

DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches


Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.



billed annually
Start Free Trial

14-day Free Trial