Technological solutions are presented for forming interconnect metallization of GaAs monolithic microwave integrated circuits (MMICs) based on the W/Cu/WN x thin-film composition. A peculiarity of these solutions is that, for the first time, copper conductors with the surface completely surrounded by layers of diffusion barriers are created using the liftoff method traditionally employed for producing GaAs MMICs. Copper conductors 380 nm thick were deposited by E-beam evaporation, while the layers of planar and sidewall diffusion barriers based on W and WN x were sputtered. For successful formation of the sidewall diffusion barriers on the vertical surfaces of the copper conductors, the profile optimization of the photoresist mask was carried out. Modes of removing the photoresist mask are presented that enable effective elimination of the metallic “veils” formed on the vertical walls of the photoresist mask in the process of sputtering of diffusion barriers. The interconnects W/Cu/WN x were integrated into the manufacturing process of GaAs microwave low-noise amplifiers based on the pHEMT with 250 nm T-gates.
Russian Microelectronics – Springer Journals
Published: Jul 6, 2015
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera