This paper provides the results of studying the formation kinetics and the structure of mesoporous silicon layers obtained by electrochemical anodization in an electrolyte based on 12% aqueous hydrofluoric acid. The electrolyte consisted only of deionized water and hydrofluoric acid and contained no organic additives in order to prevent contamination of porous silicon with carbon during the anodization. All the experiments were carried out on whole silicon wafers 100 mm in diameter, rather than samples of a small size, which are often used to save silicon. As the initial substrates we used monocrystalline silicon wafers of brand KES-0.01, which were cut from the ingots produced by the Czochralski method. Dependences of the thickness of porous silicon layers, its growth rate, and the volume porosity on the anodic current density and the anodization time are determined. Scanning electron microscopy was used to study the structure of porous silicon layers and to define the size and density of the pore channels. The regimes of obtaining homogeneous porous silicon layers for their subsequent use as buffer layers in epitaxy are found.
Russian Microelectronics – Springer Journals
Published: Nov 26, 2014
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera